A Novel High-Speed and High-Accuracy Mathematical Modeling Method of Complex MEMS Resonator Structures Based on the Multilayer Perceptron Neural Network.

Qingsong Li,Xiaopeng Sun,Dingbang Xiao,Kuo Lu,Hao Zhang,Xuezhong Wu,Kai Wu

doi:10.3390/mi12111313

Qingsong Li, Xiaopeng Sun + Show 5 more

Open Access

https://doi.org/10.3390/mi12111313

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Journal: Micromachines	Publication Date: Oct 26, 2021
Citations: 7	License type: CC BY 4.0

Affiliation: National University of Defense Technology

Abstract

MEMS resonators have become core devices in a large number of fields; however, due to their complex structures, the finite element analysis (FEA) method is still the main method for their theoretical analysis. The traditional finite element analysis method faces the disadvantages of large calculation amount and long simulation time, which limits the development of high-performance MEMS resonators. This paper demonstrates a high-speed and high-accuracy simulation tool based on the artificial neural network, where a multilayer perceptron (MLP) neural network model is constructed. The typical structural parameters of MEMS resonator are used as the input layer, and its performance indicators produced by the finite element analysis method are the output layer. After iteratively trained with 4000 samples, the cumulative error of the neural network decreases to 0.0017 and a prediction network model is obtained. Compared with the finite element analysis results, the structural accuracy error predicted by the neural network model can be controlled within 6%, but its runtime is shortened by 15,000 times. This high-speed and high-accuracy mathematical modeling method can effectively improve the analyzing efficiency and provide a promising tool for the design and optimization of different complex MEMS resonators, which exhibit remarkable accuracy and speed.

Highlights

With the development of the modern technology, micro-electro-mechanical system (MEMS) devices have become an important branch of the core sensor field [1,2,3,4,5,6,7,8,9]
The performance of the MEMS resonators is usually obtained by finite element analysis method with related simulation software
The complete procedures of the multilayer perceptron neural network have been discussed in detail in this paper

Summary

Introduction

With the development of the modern technology, micro-electro-mechanical system (MEMS) devices have become an important branch of the core sensor field [1,2,3,4,5,6,7,8,9]. Due to its advantages of small size, low cost and mass production, MEMS devices have attracted the attention of many research teams and commercial companies, dramatically increasing their demands [10,11]. Among these devices, the structure of MEMS resonators is the core, which determines their performance. Analyzing and evaluating the performance of MEMS resonator structures is a key step to promote the application and development of MEMS devices, which is the direction that many research teams are committed to study and has been reported in many literatures [12].

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Discussion

Conclusion