Abstract
An electron monochromator design is presented as an instrumental development for electron energy loss spectroscopy (EELS) and imaging in (scanning) transmission electron microscopy ((S)TEM). The main purpose of this development is enhancing the energy resolving power in spectroscopy and filtering. In addition, it helps reducing the effect of the objective lens’ chromatic aberration Cc in imaging and therefore, enhancing the spatial resolving power of electron microscopes. General estimates for the performance of a monochromator in energy distribution and the resulting usable beam currents are given. The special monochromator design presented is a ground-potential monochromator based on magnetic sector fields. The monochromator generates a spatially and angular un-dispersed spot and has no mechanically actuated parts in the filter sections. The optics can be operated at electron acceleration voltages from 30kV to 300kV and shows an energy resolving power of better than 2⋅10−7 relative to the primary electron energy. The actual device is designed to be retro-fittable to microscopes from various manufacturers.
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