Abstract
A novel graphical plot analysis method for double crystal X-ray diffraction measurements is applicable to cubic crystal epilayers grown on (100) substrate. In this method, we introduce a new term: the `difference of the virtual lattice constant, ΔA'. The ΔA values can be obtained by converting the angular difference between the relevant peak and a reference peak. By plotting ΔA values as a function of (k2+l2)/h2, parallel and perpendicular lattice constants can be easily analyzed for any sample with arbitrary relaxation rate. This advantage also reduces estimation error. This novel method and its advantages are experimentally demonstrated using InAsP/InGaAsP SLS samples.
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