Abstract

Aiming at the line defect detection of a flexible integrated circuit substrate (FICS) without reference template, there are some problems such as line discontinuity or inaccurate line defect location in the detection results. In order to address these problems, a line feature detection algorithm for extracting an FICS image is proposed. Firstly, FICS image acquisition is carried out by using the appearance defect intelligent detection system independently developed in our lab. Secondly, in the algorithm design of the software system, the binary image of the line image to be segmented is obtained after the color FICS image is classified by K-means, median filtering, morphological filling and closed operation. Finally, for an FICS binary image, an image segmentation model with convexity-preserving indirect regular level set is proposed, which is applied to extract the line features of an FICS image. Experiment results show that, compared with the CV model, LBF model, LCV model, LGIF model, Order-LBF model and RSF model, the proposed model can extract line features with high accuracy, and the line boundary is smooth, which lays an important foundation for high-precision measurement of line width and line distance and high-precision location of defects.

Highlights

  • IC packaging substrate is the key carrier in the packaging test link, which is divided into three categories: organic rigid packaging substrate, flexible packaging substrate [2] and ceramic packaging substrate [3]

  • The main contributions of this paper are: combined with the appearance defect intelligent detection system independently developed by our laboratory, aiming at the problems of line discontinuity or inaccurate line defect location in the line defect detection link of flexible circuit packaging substrate without reference template in practical engineering, a line feature detection algorithm for extracting flexible integrated circuit substrate (FICS) image is proposed

  • The convex energy functional is constructed so that the energy functional reaches the global minimum during the evolution process. This method uses the approximate weighted mean square error obtained by the local fitting function and the gray value of the inner and outer images of the contour to drive the contour to the target boundary. This method uses an auxiliary function as a regular term to weaken the excessive smoothness of the level set function, which is beneficial to improve the accuracy of FICS image line width and line distance detection

Read more

Summary

Introduction

Wafer manufacturing and packaging testing are three indispensable components in the integrated circuit industry chain. The main contributions of this paper are: combined with the appearance defect intelligent detection system independently developed by our laboratory, aiming at the problems of line discontinuity or inaccurate line defect location in the line defect detection link of flexible circuit packaging substrate without reference template in practical engineering, a line feature detection algorithm for extracting FICS image is proposed. It lays an important foundation for high-precision measurement of line width and line distance and high-precision location of defects.

Analysis of Difficulties in FICS Surface Defect Detection
The Characteristics of FICS Line Defect
Algorithm for Extracting FICS Image Line Features
Model Proposed
Algorithm Design
Hardware System Structure
The Design and Application of Software System
Evaluating Indicator
Experimental Analysis
Conclusions
Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call