Abstract
Electrostatic actuation is the most popular actuation mechanism used in micro-electromechanical systems (MEMS) due to its many inherent advantages. It is well known that the electrostatic actuated MEMS device suffers from inherently nonlinear effect known as pull-in which significantly limit its operating region. These devices belong to a class of weakly coupled EM systems, where lack of coupling between the mechanical and electrical subsystems limits the application of classical static feedback control methods. We propose a dynamic feedback controller by adopting the interconnection and damping assignment passivity based control (IDA-PBC) method, to stabilize the device over the full travel range of its movable plate and improving the performance by enhancing the coupling. It is achieved by adding an integral action controller that improves robustness, and injecting damping to the mechanical coordinates in the interconnection matrix, employing the change of coordinates. Numerical simulations illustrate the use and performance of the proposed method.
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