A novel dynamic compensation method for a contact probe based on Bayesian inversion

Abstract

Undesired dynamic characteristics constitute a major source of dynamic measurement errors for contact probes and seriously restrict the improvement of measurement velocity and accuracy. However, the dynamic characteristics of probes are difficult to improve through structural enhancement. A novel dynamic compensation method based on Bayesian inversion was proposed to improve the dynamic performance of probe systems. On the basis of the dynamic model of probe systems, a Bayesian inversion model for dynamic compensation was derived and established. A Bayesian compensation model was developed for a self-developed contact probe. A recursive algorithm was also adopted to obtain the estimated state parameters that reflect the output values of dynamic compensation. The compensation effect was verified by simulation and experimental results. The overshoot of the probe system was reduced from 99.15% to 16.46%, and the settling time was shortened from 2.4825 s to 0.1452 s. The compensation effect of this method was better than that of the classical pole-zero configuration technique. The proposed method can effectively improve the time-domain tracking performance and broaden the frequency-domain measurement bandwidth of the probe system at the same time. The suggested approach is practical, effective, and can be widely used for dynamic system compensation.