Abstract
In this work an effective MEMS based capacitive pressure measurement system is proposed. Thepressure sensing element consists of two capacitorplates. Thebottom plate is mechanically fixed, whilethe upper plate is a flexible silicon membrane with flexures. The pressure acts on the upper plate. Avariable separation between the plates is introduced.Maximizing the deflection of the plate is a keyto improve the sensitivity of the sensor. In this paper various flexure designs are studied. A comparison of the flexure sensitivity is made for the automobile tire pressure range.
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