Abstract
ABSTRACT Integrated RF-switches based on microelectromechanical systems (MEMS) promise a better performance than conventional devices. The employment of the piezoelectric effect allows a significant reduction of the device supply voltage compared to charge based actuator devices. This work presents the development and fabrication of lead-zirconate-titanate (PZT) actuated microswitches consisting of cantilevers and RF compatible contacts using chemical solution deposition (CSD) and surface micromachining. Measurements prove a possible “off-distance” of more than 20 μ m.
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