Abstract
This paper presents a novel macro/micro 3-DOF parallel platform for micro/nano positioning applications. The kinematics model of the dual parallel mechanism system is established via the stiffness model of individual wide-range flexure hinge and vector-loop equation. The inverse kinematics is analyzed and simulated on a parallel mechanism with real parameters. Whereafter, the reachable and usable workspace of the macro motion and micro motion of the mechanism are plotted. Finally, the influence of load acted on the moving platform is discussed. The investigations of this paper will provide suggestions to improve the structure and control algorithm optimization for the dual parallel mechanism in order to achieve the feature of both larger workspace and higher motion precision.
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