A novel compliant micropositioning stage with dual ranges and resolutions

Abstract

Dual-range stages are demanded in precision positioning applications that call for fine resolution in a smaller motion range and coarse resolution in a larger range. Traditional dual-range stages are realized using two actuators, which complicates the mechanism and control design procedures. This paper presents the design and testing of a novel dual-range, dual-resolution precision positioning stage driven by a single linear actuator. The stage structure is devised with leaf flexures to achieve a large stroke. Strain sensors are employed to provide different resolutions in the two motion ranges. To quantify the design of the motion ranges and fine/coarse resolution ratio, analytical models are established and verified through finite element analysis simulations. A proof-of-concept prototype is fabricated for experimental investigations and the experimental results validate the effectiveness of the proposed design. The reported ideas can also be extended to the design of multi-axis micropositioning stages.