Abstract
A novel design of calibration equipment has been developed for static and dynamic calibrations of gas and thermal sensors. This system is cheap, compact, and easily adjustable, which is also combined with a plasma surface modification source for tailoring the surface of sensors to ensure the sensitivity and selectivity. The main advantage of this equipment is that the operating temperature, bias voltage, types of plasma source (for surface modification), types of feeding gases, and gas flow rate (for calibrations), etc., can be independently controlled. This novel system provides a highly reliable, reproducible, and economical method of calibrations for various gas and thermal sensors.
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