Abstract

A novel bionic piezoelectric actuator based on the walrus motion to achieve high performance on large working stroke for micro/nano positioning systems is first proposed in this study. The structure of the proposed walrus type piezoelectric actuator is described, and its motion principle is presented in details. An experimental system is set up to verify its feasibility and explore its working performances. Experimental results indicate that the proposed walrus type piezoelectric actuator could realize large working stroke with only one driving unit and one coupled clamping unit; the maximum stepping displacement is ΔLmax = 19.5 μm in the case that the frequency f = 1 Hz and the voltage U = 120 V; the maximum speed Vmax = 2275.2 μm · s−1 when the frequency f = 900 Hz and the voltage U = 120 V; the maximum vertical load mmax = 350 g while the voltage U = 120 V and the frequency f = 1 Hz. This study shows the feasibility of mimicking the bionic motion of the real walrus animal to the design of piezoelectric actuators, which is hopeful for the real application of micro/nano positioning systems to achieve large working stroke and high performance.

Highlights

  • Positioning systems with micro/nano-scale accuracy is the key technology in the fields of ultra precision machining and measurement, optical engineering, intelligent robot, modern medical, aerospace and other high-end science and technology [1,2,3,4]

  • According to the motion stroke, the piezoelectric actuator could be classified into two types: the direct-push type and the step type

  • The step type actuator could be mainly sorted into ultrasonic type, inchworm type and friction-inertial type on the basis of different motion principles

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Summary

Introduction

Positioning systems with micro/nano-scale accuracy is the key technology in the fields of ultra precision machining and measurement, optical engineering, intelligent robot, modern medical, aerospace and other high-end science and technology [1,2,3,4]. To achieve the accuracy in micro/nano scale, the application of modern precision driving technology puts forward higher requirements for the advanced actuators. According to the motion stroke, the piezoelectric actuator could be classified into two types: the direct-push type and the step type. The direct-push type actuator mainly utilizes the piezoelectric elements such as piezoelectric stack, piezoelectric wafer to directly push the mechanism to obtain small deformation. It has the advantages of simple structure and reliable system; its working stroke is small (generally several micrometers), which leads to limitation on the occasion of the motion with large working stroke [11,12,13,14,15]. Different type piezoelectric actuators have different merits and demerits on positioning accuracy or output force

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