Abstract
Summary form only given. The multistep microlens with same step height are the important components in the optical microelectromechanical system (MEMS), especially Si(100) microlens for the infrared (IR) imager to condense IR radiation into the detector module and increase its responsibility. We have demonstrated the multistep Si(100) terraced structure for microlens by one photomask and KOH anisotropic etching.
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