Abstract

PDMS (Polydimethylsiloxane) thin films are widely used in stretchable electronics. However, it still remains challenging to fabricate PDMS thin films in an easy and convenient manner. To address this issue, here we novelly present an approach to ease the fabrication of PDMS membranes using lift-off method. For application as substrates in flexible biosensors, a gold thin film has been deposited on the PDMS thin film. The reliability of electric conductivity has been investigated. Moreover, biocompatibility of the PDMS thin film has been tested by culturing HeLa live cells it. The results demonstrate that the PDMS thin films fabricated by lift-off method has a high prospect towards application as substrate in flexible biosensors.

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