A novel approach for negative ion analysis using 160 GHz microwave interferometry and laser photodetachment in oxygen cc-rf plasmas

Abstract

Microwave interferometry at 160.28 GHz with Gaussian beam propagation (beam waist: 5 mm) and laser photodetachment were combined for the analysis of negative atomic oxygen ions in the bulk plasma of an asymmetric capacitively coupled 13.56 MHz discharge (cc-rf). The line-integrated negative oxygen ion density amounts to between 2.5 × 1014 and 1015 m−2 depending on the oxygen pressure and rf power. Furthermore, the measured decay of the detachment signal reveals two modes of rf oxygen plasma characterized by different electronegativities. High electronegativity, α > 2, is associated with a low decay time constant of only a few microseconds, whereas in oxygen plasmas with low electronegativity, α < 1, the relaxation of electron density needs much longer with typical decay time constants of up to about 100 µs. The transition between the two modes shows a step-like characteristic and was observed at a specific rf power depending on the oxygen pressure. In the case of high electronegativity the electron density relaxation can be described by a simple 0D-attachment–detachment model, taking into consideration a constant density for positive ions and neutral oxygen species. Using the appropriate rate coefficients from the literature and the experimentally determined effective rate coefficients of first order kinetics, the evaluation of the attachment and detachment rates indicates the significant role of O2(a 1Δg) in the formation and loss of negative atomic oxygen ions.