Abstract
A novel all-elastomer MEMS tactile sensor with high dynamic force range is presented in this work. Conductive elastomeric capacitors formed from electrodes of varying heights enable robust sensing in both shear and normal directions without the need for multi-layered assembly. Sensor geometry has been tailored to maximize shear force sensitivity using multi-physics finite element simulations. A simple molding microfabrication process is presented to rapidly create the sensing skins with electrode gaps of 20 m and sensor spacing of 3 mm. Shear force resolution was found to be as small as 50 mN and tested up to a range of 2 N (dynamic range of ). Normal force resolution was found to be 190 mN with a tested range of 8 N (dynamic range of ). Single load and multiload tests were conducted and the sensor exhibited intended behavior with low deviations between trials. Spatial tests were conducted on a sensor array and a spatial resolution of 1.5 mm was found.
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