Abstract
ABSTRACTA novel atomic force microscopy (AFM) probe has been developed to expand the capability and applications of dip-pen nanolithography (DPN) technology. This new probe has integrated microchannels and reservoirs for continuous ink feed, which allow “fountain-pen” writing called “Fountain Pen Nanolithography” (FPN). Ink is transported from the reservoirs through the microchannels and eventually dispensed onto substrates via a volcano-like dispensing tip. Numerical simulations have been performed to select optimal materials and suitable tip shapes providing a stable fluid-air interface in the tip. Microchannel and dispensing tip have been fabricated by surface micromachining, in particular employing 3 layers of thin films. Fluid flow through the microchannels has been experimentally examined. The probe was used to write on a gold substrate.
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