A nonlinearity compensation approach based on Delaunay triangulation to linearize the scanning field of dual-axis micromirror

Abstract

Linear scanning is of great importance in many applications of dual-axis micromirror. However, its scanning field is distorted due to the nonlinear and coupled electrostatic torques. This paper presents a nonlinearity compensation approach based on Delaunay triangulation (DT) to linearize the scanning field. The linearization starts with the sampling of the original scanning points, which are then meshed by the Delaunay triangulation. The two command voltages are compensated by using local interpolation on the generated mesh. Barycentric coordinates are used for the interpolation. The distortion rates for the left, bottom, right and top of the original scanning field were 33%, 26%, 34% and 30%, respectively. All of the distortion rates were suppressed and the scanning field was significantly linearized by the proposed approach.