Abstract

A nondestructive and accurate measurement method and related apparatus based on the split-cylinder resonator techniques is descried in this paper. The dielectric constants and loss tangents of the flat substrate materials are suitable to be characterized and then calculated by software programmed according to a rigorous mode match analysis of the TE011 mode. The dielectric properties of some typical substrate materials have been measured, and measurement uncertainties are also given in this paper. In addition, the effect of sample thickness on the dielectric properties is also investigated. These results demonstrate that this technology is capable of accurately characterizing the dielectric properties of flat substrate materials versus frequency by changing the sample thickness.

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