A nodal analysis method for electromechanical behavior simulation of bow-tie shaped microbeams

Abstract

In order to perform mixed-domain simulation of electrically actuated bow-tie shaped doubly-fixed microbeams, a nodal model for the trapeziform beam and corresponding equivalent circuit are developed by HSPICE. The nonlinearities including mid-plane stretching and electrostatic forcing are considered. In the modeling, the Galerkin residual method is used to discretize the partial differential equations of the trapeziform beam. It proves accurate in comparison with FEA simulation results and available experimental data. In particular, as a lumped behavioral model, it is executed much faster than FEM program. The proposed model could be expected to be useful in the optimum design of related MEMS devices.