A Newly Developed X-Y Planar Nano-Motion Table System with Large Travel Ranges

Abstract

Precision motion control technology has been widely used in high accuracy applications such as advanced scientific instruments and semiconductor fabrication equipment. In particular, the nano-motion control system with multiple degrees of freedom positioning in large travel ranges has been required in the field of precision engineering. In order to realize such a system, it is necessary and indispensable to develop a planar motion table system based on a new design concept. This paper presents a newly developed X-Y planar nano-motion table system with large travel ranges. This system is composed of a fine motion table and a coarse motion mechanism. The fine motion table is supported by porous aerostatic bearings and driven by voice coil motors with a laser interferometer feedback in a perfect non-contact condition. In addition, the table is driven at the center of gravity during the X-Y planar motion. The coarse motion mechanism has the frame structure with the coils of voice coil motors for the fine motion table. In order to enlarge the table travel ranges, the coarse motion mechanism follows the fine table motion. Performance evaluation results confirm that the developed table system has a remarkable performance which includes nanometer positioning capability over large travel ranges.