Abstract

Based on the constraint and position identification (CPI) approach for synthesizing XYZ compliant parallel mechanisms (CPMs) and configuration modifications, this paper proposes a new fully-symmetrical XYZ CPM with desired motion characteristics such as reduced cross-axis coupling, minimized lost motion, and relatively small parasitic motion. The good motion characteristics arise from not only its symmetric configuration, but also the rigid linkages between non-adjacent rigid stages. Comprehensive kinematic analysis is carried out based on a series of finite element simulations over a motion range per axis less than ±5% of the beam length, which reveals that the maximum cross-axis coupling rate is less than 0.86%, the maximum lost motion rate is less than 1.20%, the parasitic rotations of the motion stage (MS) are in the order of 10−5 rad, and the parasitic translations of the three actuated stages (ASs) are in the order of 10−4 of the beam length (less than 0.3% of the motion range), where the beam slenderness ratio is larger than 20. Furthermore, the nonlinear analytical models of the primary translations of the XYZ CPM, including the primary translations of the MS and the ASs, are derived and validated to provide a quick design synthesis. Moreover, two practical design schemes of the proposed XYZ CPM are discussed with consideration of the manufacturability. The practical designs enable the XYZ CPM to be employed in many applications such as micro-/nano-positioning, micro-/nano-manufacturing and micro-/nano-assembly. Finally, a spatial high-precision translational system is presented based on the practical design schemes, taking the actuator and sensor integration into account.

Highlights

  • Compliant mechanisms have no traditional sliding or rolling hinges, thereby lending advantages over rigid-body counterparts, such as no backlash, no requirement for lubrication, simplified manufacture, and low part count [1,2,3,4,5,6,7,8]

  • According to the constraints selected, the three passive modules (PMs) or the three active modules (AMs) in the three legs can be designed with the same structure, because the selected constraints of the PMs or the AMs have the same pattern in their own local coordinate systems

  • This paper proposed a new, compact and symmetric XYZ compliant parallel mechanisms (CPMs), using the constraint and position identification (CPI) approach with a configuration modification

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Summary

Introduction

Compliant mechanisms have no traditional sliding or rolling hinges, thereby lending advantages over rigid-body counterparts, such as no backlash, no requirement for lubrication, simplified manufacture, and low part count [1,2,3,4,5,6,7,8]. Many XYZ CPMs [6,9,10,11,12,18,19,20] have been designed using the pseudo-rigid-body-based model substitution approach [21], the constraint-based approach [22,23], the screw-theory-based approach [24], the freedom and constraint topology approach [25,26], and the CPI approach [18] These existing XYZ CPMs have one or some of the four desired performance characteristics mentioned above. This paper proposes a new XYZ CPM whose cross-axis coupling rates, lost motion rates, parasitic rotations and parasitic translations are minimized.

CPI Approach Revisit
Design of an XYZ CPM
FEA-Result-Based Kinematic Analysis
Analytical Modeling
Fabrication Considerations
System Design
Findings
Conclusions
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