Abstract

This paper describes an innovative X-ray fluorescence spectrometer designed to achieve high-energy resolution, position resolution, and detection rate in elemental mapping applications. The spectrometer is based on a ring-shaped monolithic array of silicon drift detectors (SDDs) with a hole cut in its center. A coaxial X-ray excitation beam is transported to the sample through this hole. In this way, the solid angle for the collection of the X-ray fluorescence is optimized. Moreover, the X-ray beam is collimated on the sample using capillary optics in order to obtain high photon density in a small excitation spot. Detector, optics, and generator are assembled in a compact vacuum tightened unit. The structure of the proposed spectrometer and the first experimental results of its characterization are presented.

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