Abstract
Measurements were made on various characteristics of a new vacuum system suited for an electron microscope. The system consists of two oil diffusion pumps connected in cascade. The gun chamber and the specimen chamber were evacuated by the upper pump, and the viewing chamber and the camera chamber by the lower one. Evacuation characteristics after exchanging films or specimens were effectively improved by this system. As a result, the pressure in the specimen chamber and the gun chamber rapidly reached the lower 10-6 Torr region. Features of this new vacuum system are listed below: 1. Gases in the viewing chamber and the camera chamber do not adversely affect the vacuum of the gun chamber and the specimen chamber. 2. Effective pumping speed of the upper pump is high. 3. Fluid in the upper pump is not contaminated by rotary pump oil. 4. This vacuum system is suited for an electron microscope in structure and size.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
