Abstract
A new type of ultralight flexible a-Si solar cell fabricated on a transparent polyimide film substrate, has been developed. High photoconductivity (σph) of 2×10-5 Ω-1 cm-1 and high photosensitivity (σph/σd) of 1×106 were obtained with a-Si films deposited by H2-dilution of SiH4 on a transparent polyimide film substrate at 180°C. Prebaking the transparent polyimide film substrate effectively reduced the impurity content of the a-Si film. A maximum output power of 550 mW and a power-to-weight ratio of 275 mW/g were obtained for an integrated-type a-Si solar cell with a size of 110×115 mm.
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