Abstract
A new type of Bio-Chemical sensor based on SPM was designed and fabricated in this paper. The Bio-Chemical sensor uses the SPM head as the probe part, which can convert the physical variation quantity on the micro-cantilever to electrical signals, and finally change it into image. In the experiment, the Bio-Chemical sensor based on SPM is used to detect two kinds of ssDNA molecules in PBS solution. By comparing the data in our experiment with that in other experiment, it can be seen that detecting unknown DNA molecules and other chemical or biological molecules in solution by this type of Bio-Chemical sensor is efficient and practical.
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