Abstract
In this paper, a novel topology optimization scheme is developed for a systematic design of electro-thermo-mechanical devices employing discrete domain with beam elements. To address the shortcomings of previous related work, frame ground structure is used for discretization and real-coded genetic algorithm is employed to solve the optimization problem. The failure criterion is addressed by imposing a buckling constraint. The proposed optimization scheme is implemented and verified with an example of electro-thermo mechanical actuator. The performance of the optimized configuration is further studied with finite element model in ANSYS. The results of this paper confirm that the presented method is a powerful tool to design MEMS structures with on-chip actuation.
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