A new technique using foil electrodes for the electro-discharge machining of micro grooves

Abstract

Micro groove machining is an important task in the fabrication of microdevices. Modern microdevices need metal micromachining techniques such as electro-discharge machining (EDM) and lasers. Micro EDM is a versatile technique for machining electrically conductive materials to make components for microsystem technologies. However, it is generally considered a slow process, because the material removal rate (MRR) is relatively low compared to other machining processes. In this paper, we propose a method to increase the MRR. Foil is used as a tool electrode in the machining of micro grooves and micro slits in brass. We have achieved material removal rates as high as 0.002 mm3 min−1.