A new technique for ferroelectric microfluidic channels by rolling method

Abstract

Microfluidic channels on the size of tens of microns are being developed for use in a variety of applications such as microreactors, DNA analysis, and micro total analysis systems. Among the fabrication techniques for microfluidic channels, the recently-developed rolled-up method provides a great opportunity to integrate tubular channels by selective underetching and release of a strained thin film from a substrate. In this work, microfluidic channels with large diameter-to-length aspect ratios have been fabricated by a rolling method. The micro-FTIR characterization demonstrated that the functional poly(VDF-TrFE) ferroelectric polymer was engineered in the micro channel. The ferroelectric properties of the microchannels were studied by piezoresponse force microscopy (PFM). Local hysteresis measurement suggests that the microchannels show good ferroelectric properties. Fluid moving and emptying of the microfluidic channels were captured by video microscopy.