Abstract

Continued progress in semiconductor process and device research will require new modes of collaboration and interaction. Internet technology will play a large role in creating and supporting a new distributed community of researchers. Stanford and MIT are working together to explore several elements of emerging networking technology in the context of semiconductor research. These elements include a help system, fabrication facilities database, a Collaboratory, networked process repository, remote simulation, remote process execution, remote microscope, and electronic technical publication and repositories.

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