Abstract

Feedforward-feedback control is widely used in motion control of piezoactuator systems. Due to the phase lag caused by incomplete dynamics compensation, the performance of the composite controller is greatly limited at high frequency. This paper proposes a new rate-dependent model to improve the high-frequency tracking performance by reducing dynamics compensation error. The rate-dependent model is designed as a function of the input and input variation rate to describe the input–output relationship of the residual system dynamics which mainly performs as phase lag in a wide frequency band. Then the direct inversion of the proposed rate-dependent model is used to compensate the residual system dynamics. Using the proposed rate-dependent model as feedforward term, the open loop performance can be improved significantly at medium-high frequency. Then, combining the with feedback controller, the composite controller can provide enhanced close loop performance from low frequency to high frequency. At the frequency of 1 Hz, the proposed controller presents the same performance as previous methods. However, at the frequency of 900 Hz, the tracking error is reduced to be 30.7% of the decoupled approach.

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