Abstract

A potentiometric SO2 gas sensor based on Li3PO4 solid electrolyte has been developed using Au as the reference electrode and Li2SO4/V2O5 as the sensing electrode. The Li3PO4 film was deposited on Al2O3 substrate by resistance heating evaporation. Two Au films with designed patterns were formed on the Li3PO4 film by micro-fabrication technologies. The sensing electrode covers one electrode partly using thick-film technology. The electromotive force values between the sensing electrode and the reference electrode were measured and various characteristics were studied including sensitivity, response characteristics, and stability and selectivity. According to the results, we conclude that an optimal working temperature of the SO2 sensor is 500 °C, the measurement range is 0-100 ppm, the sensitivity is about 32.47 mV/dec, the response and the recovery time is about 5 min and 10 min, respectively. And the stability and the selectivity of the sensor are good, making it have potential in SO2 measurement of living environment.

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