Abstract
A fiber probe-based positioning scan approach was established, whose precision can reach as high as 0.8 μm. And a set of modified microscope system was designed utilizing this approach, in which the scanning probe microscope (SPM) combined with an optical microscope was manipulated. The optical microscope and scanning probe can conveniently be switched through a switch panel. The observation period of samples can significantly be shortened. And more reliable images can be provided using this approach. Our design can effectively solve the inherent disadvantages of SPM technology, which makes SPM scan and image more reliably, conveniently, safely and rapidly.
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