Abstract

In precision motion stages, jerk limitation is important to suppress transient vibration and to reduce the settling time, as well as to improve the machine speed and accuracy. In this paper, a novel motion control method is presented which aims to reduce jerk and transient vibration for linear motion stages. In this approach, the acceleration profile is designed based on a level-shifted cosinoidal function to obtain a smoother movement without any corner. The velocity and the displacement profiles are calculated by integration. To implement the proposed motion profile on a DSP-based motion controller, a table look-up and linear interpolation method is used to relieve the calculation burden to the DSP controller in real-time. The values between the look-up table steps are linearly interpolated using the DSP. A voice coil motor driving motion stage with a fixed-point DSP controller is used as the testbed, where a point-to-point linear motion task is designed and implemented to test the proposed motion profile. Experimental results have showed that by using the new profile, the motion induced vibration on the stage frame can be greatly reduced.

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