A NEW MODELING METHOD OF VERTICAL ELECTROSTATIC COMB DRIVE

Abstract

International Journal of Computational Engineering ScienceVol. 04, No. 03, pp. 641-644 (2003) Poster PapersNo AccessA NEW MODELING METHOD OF VERTICAL ELECTROSTATIC COMB DRIVEJ. C. Chiou and Y. J. LinJ. C. ChiouDepartment of Electrical and Control Engineering, National Chiao Tung University, Hsin-Chu, Taiwan, R.O.C. Search for more papers by this author and Y. J. LinDepartment of Electrical and Control Engineering, National Chiao Tung University, Hsin-Chu, Taiwan, R.O.C. Search for more papers by this author https://doi.org/10.1142/S1465876303001940Cited by:2 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractIn this paper, we have successfully modeling a vertical motion electrostaitc comb drive and proof it's efficiency by using existed experimental data. A commercial 3-D MEMS Simulator was employed to stimulate the static levitation of vertical comb drive. Note that, by gradually increasing the dc bias voltage, each simulation process is either converged slowly or even enters the divergence stage. Hence, the 3-D simulator is degraded in simulating vertical electrostatic comb drive in full input range. In the present modelling method, Maxwell 2-D solver was employed to calculate the comb finger capacitance at different z positions firstly. Second, A 6th-order curve fitting was used to extract the capacitance function, C(z), and the unit electrostastic force function, dC/dz, was obtained by taking derivative of capacitance function. Finally, a dynamic system model block diagram was established in Matlab Simulink program environment. A set of ideal geometry parameter was selected to verify the accuracy of our model. The simulation results were compared with the experiment results, and a 50% error was observed. After replaces the ideal geometry parameters with actual geometry parameters, the error was reduced substantially, within 10%.Keywords:vertical comb drivelevitationmodelingMEMS simulationconvergence References IntelliSuite Windows Version User Documentation. Version 10. Corning IntelliSense Inc., Wilmington, MA 01887 . Google ScholarH. Yie, X. Cai and J. White, Numerical Modeling of Processes and Devices for Integrated Circuits, 1994 (International Workshop, 1994) pp. 137–140. Crossref, Google ScholarW. C. Tang, M. G. Lim and R. T. Howe, IEEE JNL. Of MEMS 1(4), 170 (1992). Crossref, Google ScholarH. Xie and G. K. Fedder, Sensors and Actuators A95, 212 (2002). Google Scholar H. H. Bau and N. F. deRooij , Sensors a comprehensive survey: Volume 7: Mechanical Sensors ( Weinheim , 1994 ) . Google Scholar FiguresReferencesRelatedDetailsCited By 2A Micromirror With Large Static Rotation and Vertical ActuationJin-Chern Chiou, Chin-Fu Kou and Yung-Jiun Lin1 Mar 2007 | IEEE Journal of Selected Topics in Quantum Electronics, Vol. 13, No. 2MEMS-based miniature optical pickup Yi Chiu, Cheng-Huan Chen, Jin-Chern Chiou, Weileun Fang and H.-P.D. Shieh1 Feb 2005 | IEEE Transactions on Magnetics, Vol. 41, No. 2 Recommended Vol. 04, No. 03 Metrics History Keywordsvertical comb drivelevitationmodelingMEMS simulationconvergencePDF download