Abstract
The trend toward miniaturization in manufacturing has led to a requirement for micro/nano measuring techniques capable of measuring tiny features on small components. In this paper we propose and demonstrate a novel scheme for micro/nano displacement measurement based on a double-FBG (fiber Bragg grating) sensing structure, a suspended FBG probe stem and a fiber fused micro-ball tip. Such a scheme has some advantages including robustness, sensitivity, small size with large aspect ratio attainable, simplicity and economy. The preliminary experiments showed that the prototype yielded a measurement resolution of 10 nm and a nonlinear error of 150 nm.
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