A New Method of Making Grating - Etched by SPM

Abstract

The original grating is etched by using the nanometer etching function of Scanning Probe Microscopy (SPM). There are five grooves etched on the surface of polymer material. The grating constant is 796.87 nm, so the fringe density is 1254 lp/mm. Diffraction pattern of the original grating is obtained on Michelson interferometer. A new method of making original grating is found. Since the Nominal Tip Radius of Curvature (NTRC) of Etched Silicon Probe (ESP) of used Veeco SPM is 5-10 nm, the etching grating should have fringe density of 50 000 -100 000 lp/mm.