Abstract
A new method for thickness determination of single-crystal thin samples at exact zone axis orientation, based on pattern recognition in convergent beam electron diffraction (CBED), is presented. The method is especially well suited to materials with a large unit cell in zone axis directions where the reciprocal lattice is uniformly dense with diffraction points. The new method is based on comparison of a measured CBED zone axis pattern with a set of calculated ones. Its accuracy was estimated to be around 10% in the 5–100 nm thickness range as checked for garnets at the [111] zone orientation.
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