Abstract
PurposeThe purpose of this paper is to introduce a new method for the design of a pressure sensor in the hyperbaric environment.Design/methodology/approachThe new method focuses on two vital parameters that are closely related to the output and sensitivity of the sensor. The rectangular diaphragm structure is adopted, and the piezoresistors are planted on the surface accordingly. To verify the effect of the method, a contrastive sensor chip is fabricated in a conventional way, and two types of sensor chips are tested at the same time.FindingsThe new method for the design of a pressure sensor is advisable and favorable. The sensor fabricated by the method possesses outstanding high sensitivity and a wide measurement range.Originality/valueThis paper provides a new idea for increasing the measurement range of the pressure sensor with an acceptable sacrifice of sensitivity.
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