Abstract

The influence of backsputtered molybdenum and tin on gallium liquid metal ion source emission and focused currents is examined. In a typical ion gun arrangement, extractor and aperture surfaces act as sources of contaminant material. By selecting appropriate materials for the construction of these components, the stability of focused gallium ion currents is substantially improved. Materials which form a lower melting point solution when mixed with gallium, i.e., indium and tin, yield stable source operation and longer lifetimes. The implications of the long-term use of these materials in an ion gun are discussed, as well as the increased ability to analyze the effects of residual gases and secondary electrons on source operation.

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