Abstract
An new optical method for simultaneously inspecting opposite surfaces defects of thermoelectric cooler (TEC) components that meets condition of equal optical paths for both surfaces imaging has been proposed. The optical apparatus for surfaces defects inspection has been designed and established with “confocal” imaging system consisting of two trapzoid reflection prisms and one optical images combiner. Experimental investigations on defects inspection with the “confocal” imaging system have been carried out. The results showed that the proposed optical method can be used to simultaneously inspect the defects of opposite surfaces of TEC components without need to employ a tele-centric imaging lens with large depth of focus. It was concluded that the optical inspection method can meet the technical requirements for inspecting opposite surfaces (both side surfaces, or both top and bottom surfaces) defects of TEC components and has advantages of equal good imaging quality, increased inspection accuracy and throughput, simplified system configuration and improved system reliability etc.
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