Abstract
ABSTRACTExperimental results obtained in two different HVPE reactors are analyzed and compared to the theoretical curves, taking into account the surface kinetics, the mass transfer, and parasitic deposition on the glass walls before the substrate. Unexpected high growth rate values, up to 50νm/h, were measured in conditions of expected substrate etching by HCl. A systematic experimental study of this new phenomenon is presented together with a theoretical analysis. This analysis suggests a new mixed general mechanism of growth.
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