Abstract

Microchannels are important components of microelectromechanical systems (MEMSs) that encounter rarefaction effects due to their small-scale characteristics. The influence of rarefaction effects on the flow stability of microchannels should be investigated to improve MEMS performance. Based on kinetic theory, a linear stability analysis approach for low-speed rarefied flows was developed by using the Bhatnagar–Gross–Krook (BGK) model of the Boltzmann equation with an external force term. This approach was applied to study the linear temporal stability of microchannel flows. A slip flow model was introduced for comparison. The corresponding eigenvalue problem was solved with a Chebyshev collocation method. This novel approach yielded a critical Reynolds number of 5778. Analysis of the validity and accuracy of the slip flow model shows that although this model cannot capture the Knudsen layer structure, this approach effectively improves the prediction accuracy of the growth rate of the least stable mode. However, the prediction accuracy gradually decreases with increasing Knudsen number. Compared with the stability results obtained from the BGK equation, the Navier–Stokes equations-based stability analysis method always underestimates the disturbance growth rate, regardless of whether a slip flow model is used. The stability analysis results show that rarefaction effects stabilize the flow. The degree of rarefaction does not affect the trends of growth rate and phase velocity with wavenumber, nor does it affect the shape of the velocity eigenfunctions. For a rarefied case, increasing the Mach number has a destabilizing effect on low-speed microchannel flows.

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