A new latched 2 × 2 optical switch using bi-directional movable electrothermal H-beam actuators

Abstract

Combining a new H-beam actuator, movement link structure, reflective micro-mirror, and arched buckle spring to demonstrate a new compact latched 2 × 2 optical switch device is first reported. This novel H-beam actuator can generate bi-directional static displacement and bi-directional motion. Optical switch using this H-beam actuator is well functioned and exhibits good optical characteristics with industrial level performance. The measured optical switching characteristics include switching time of 5 ms under a 25 V dc pulse, back reflection loss of −52 dB, cross-talk of −60 dB, insertion loss of 0.8 dB, polarization-dependent loss of 0.03 dB, and wavelength-dependent loss of 0.11 dB.