Abstract
It is shown that X-ray specular reflectivity may be described in terms of canonical distribution functions (CDFs) pj(z) which is a probability to find an element of sort j at a depth z from the sample surface. The problem reduces to determine K CDFs, where K is the number of elements in the multilayer sample. Using the properties of the canonical functions, we have introduced the interface function pint(z) and use it as one unknown function at solving the integral equation. The integral Fredholm equation of the first kind belongs to the class of ill-posed problems and for solving it needs special methods. We use the Tikhonov regularization method. This method is applied to study the low contrast multilayer systems.
Published Version
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