Abstract
A new manometer to measure gas pressures between vacuum and one atmosphere has been developed and is capable of easily tracking a continuously changing pressure at rates up to 600 Pa/s. It consists of a U-tube manometer in which the mercury surfaces are the reflectors of a Michelson interferometer. The difference in heights of the mercury surfaces is detected and measured by use of laser interferometry techniques with a He-Ne laser. The manometer is sensitive to changes in pressure of less than 40 mPa, but the ultimate accuracy of 180 mPa at a pressure of 101 kPa (2 parts in 106) is limited by the temperature uniformity and stability (10 mK).
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