Abstract
In this letter, a fan-out-package-embedded power inductor technology is proposed. The inductor is embedded in a silicon-based fan-out package and surrounds the packaged die in which a voltage converter IC can be put. To demonstrate the integrated power inductor technology, a 2.4-nH air-core inductor for integrated voltage regulator applications is fabricated. The fabricated inductor shows a dc resistance of 5.0 $\text{m}\Omega $ and quality factors of 43–67 in the frequency range of 100–500 MHz. The small dc resistance and high quality factors make this integrated inductor technology promising for integrated power conversion.
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