Abstract

We report on the development of a new family of superconducting quantum interference device (SQUID) current sensors based on sub-micron cross-type Josephson tunnel junctions. Their low total junction capacitance permits high usable voltage swings of more than 100 μV and exceptional low noise of the SQUIDs at 4.2 K. Integrated rf-filters as well as high tolerable background fields during cool-down of up to 9.6 mT enable their highly reliable and easy use. With input coil inductances ranging from 10 nH to 2.8 μH and current sensitivities and coupled energy resolution down to 65 fA Hz–1/2 and below 10 h, respectively, they are a versatile tool for numerous applications.

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