Abstract
In this paper, we present a new design for a micro-opto-electro-mechanical (MOEMS) gyroscope based on a whispering-gallery mode (WGM) microdisk resonator and MEMS resonator. The mechanical characteristics, frequency split, and quality factor (Q) of the MEMS resonator; the optical characteristics, Q value, and coupling regimes of the WGM resonator; and the coupling between the two resonators were analyzed. Its operation principle—the transformation process from angular velocity to the resonance wavelength of the WGM resonator—is presented at same time. Next, the analysis conclusions were validated with the help of simulations in ANSYS and FDTD (Finite-Difference Time-Domain) Solutions. Afterwards, some key specifications were estimated based on the results of simulations. Lastly, the fabrication process is detailed.
Highlights
Gyroscopes are essential for a variety of applications ranging from inertial navigation to motion sensing in video games
We propose a new type of gyroscope based on the use of whispering-gallery mode (WGM) resonators fabricated on an SOI wafer; the WGM resonator was chosen for the kernel sensing components of the gyroscope
The WGM resonator was used to measure the deformation of the MEMS disk resonator in the sense mode, which is related to the angular velocity
Summary
Gyroscopes are essential for a variety of applications ranging from inertial navigation to motion sensing in video games. The drawbacks to using an MEMS gyroscope using the capacitive method, which is the main type currently in the market, include suboptimal precision and anti-electromagnetic interference. They are not suitable for use in military weapons and commercial production, which demand the use of a low-cost gyroscope with high precision. There are many different kinds of MOEMS inertial sensors according to their micro-photonic components, including grating, an optical cavity, and a wave guide. The WGM resonator was used to measure the deformation of the MEMS disk resonator in the sense mode, which is related to the angular velocity. Structure of the MOEMS Gyroscope and Operational Principle of the MEMS Disk Resonator
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