Abstract
An atmospheric pressure microwave plasma source (APMPS) that can generate a large volume of plasma at an atmospheric pressure has been developed at Tsinghua University. This paper presents the design of this APMPS, the theoretical consideration of microwave plasma ignition and the simulation results, including the distributions of the electric field and power density inside the cavity as well as the accuracy of the simulation results. In addition, a method of producing an atmospheric pressure microwave plasma and some relevant observations of the plasma are also provided. It is expected that this research would be useful for further developing atmospheric pressure microwave plasma sources and expanding the scope of their applications.
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